Imaging Ellipsometer: Specifications

Light Source	Quartz halogen lamp, Kohler illumination. Wavelength selected by interference filter, 40 nm bandwidth. Monochromator optionally available.
Polarisers	Polaroid.
Detector	Digital CCD camera. Resolution 12 bit per pixel, area 256x256 pixel. Dynamic range > 70 dB (typical). Wavlength range 200 < l < 1200 nm. A larger CCD area (512x512 pixels) is available upon request. Larger CCDs reduce the measurement speed.
Spatial Resolution	3 µm at highest magnification.
Table	Ultra high rigidity table with incident and reflection arms in vertical plane. Arms separately driven by stepping motors with angular resolution of 1/20 degrees. Table allows rotation of arms through 360°. Closest angle between arms 20°. 140 mm free diameter in center of table. XYZ adjustable sample mount.
Sensitivity	Im(r), Re(r) < 10-3 at 1 s response time (reflection from glass).
Speed	Ellipsometry image: 65000 pixel in 1 s. Direct image (in Brewster angle microscope mode): > 100 frames/s.
Computer Control	Software implemented as extension to the IgorPro data analysis package by WaveMetrics (see additional information sheet) running on WindowsNT. Hardware interface through PCI bus with DMA transfer of image data in real time. Contact us for information on support of Macintosh PowerPC systems.
Data Analysis	Profile traces, 3-dimensional surface plotting; 3-dimensional display of time resolved data; QuickTime support. Image enhancement, FFT, digital filters etc available (especially useful in Brewster angle microscope mode). Simulations of ellipticity are provided for layers on substrates, as a function of angle of incidence, layer thickness, surface and film optical anisotropy. Data import and export in standard image formats, NanoScope AFM/STM images, and in formats of many other programs such as Excel, MatLab, and others.
Special Features	Ellipsometry image calculation can be turned off for use as Brewster angle microscope.
Options	Alternative objective lenses Color Printer Removable mass storage device (ZIP or JAZ drive) Installation and training

Contact us if your application requires a custom configuration. In most cases, the modular design of the Imaging Ellipsometer allows us to implement non-standard setups without extra charge.

© beaglehole instruments 1998,1999 All material on this page is copyright. Last updated: Thursday, 18 January 2001