bi ltd

Normal Incidence Picometer Ellipsometer: Specifications

Light Source:
75 W Xe high pressure lamp with 100 mm monochromator

Polarizers:
Calcite Glan prisms, ø = 15 mm

Wavelength Range:
230 - 800 nm

Birefringence Modulator:
3 component high stability design, 50 kHz modulation frequency

Detector:
Si Photodiode

Electronics:
2 analog lock-in amplifiers at 50 and 100 kHz for simultaneous readout of Re(Dr/r) and Im(Dr/r)

Sensitivity:
Re(Dr/r) > 3×10^-5 at 100 ms integration time; 1×10^-5 at 1 s.

Speed:
Fastest response time is 1 ms; 100 ms typical.

Computer Control:
IgorPro with Picometer Ellipsometer control extension and additional components for RAS/RDS analysis. See Picometer Ellipsometer for more information on the control software.

Adaption:
Adaption to growth systems requires compatible mounts and strain-free windows; contact us for more information.

Options:

True normal incidence with beamsplitter and laser light source
Oblique incidence ellipsometry (with Picometer Ellipsometer Table)
Contact us if you have special requirements!