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Like
the Picometer Ellipsometer, the Imaging Ellipsometer
is based on the phase modulation technique which
due to its intensity throughput and lack of
insensitive regions is especially suited to
imaging. Unlike conventional null ellipsometers
that are based on rotating polarisers, the Imaging
Ellipsometer will retain its high sensitivity
even under difficult measuring conditions. This
especially important for applications in unstable
environments, such as when investigating liquid surfaces.
In
the Imaging Ellipsometer, the light from the light
source is passed through a fixed polariser and
then through a continuously rotating retarder
which is phase locked to the camera's frame rate.
The rotation speed can be altered to either optimise
the signal noise or to achieve a higher imaging
frame rate. The system can deliver a full ellipsometry image in
up to 0.5 s. If the application does not require
true ellipsometric measurements, the retarder
can be held at a fixed position and the imaging
system can be run at the full frame rate of more
than 100 frames/s. The instrument then acts as
a Brewster Angle Microscope.
The imaging is done with a high speed CCD camera
through a microscope lens. The magnification of
the imaging optics is continuously adjustable
up to a maximum lateral resolution of 3 µm
per CCD pixel.
In
the standard version of the instrument, the full
CCD area has 256x256 pixels. Within this area,
the operator can select a working window of arbitrary
size and location. A high speed PCI bus framegrabber
allows the rapid transfer of images from the CCD
to the computer, which processes the image data
to calculate the final ellipsometry image. A full
frame ellipsometry image can be obtained with
a sensitivity of 10-3
in Im(r) and Re(r) in about
1 s. Thus for the same observing time the sensitivity
is about a factor of 100 less than that of the
Picometer Ellipsometer, which is consistent with
a variation proportional to the square root of
the number of beams (pixels) observed during that
time.
As in the Picometer Ellipsometer, the control
software for the Imaging Ellipsometer is based
on the IgorPro data analysis program. A complete
range of image analysis features are available
including filters, FFT, and surface plotting.
The software is fully compatible with the Picometer
Ellipsometer software and even allows the same analysis routines
to be applied to both 1- and 2-dimensional data.
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