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Phase Modulation |
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Options
Alternative
objective lenses
Color
Printer
Removable
mass storage device (ZIP or JAZ drive)
Installation
and training
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| Light
Source |
Quartz
halogen lamp, Kohler illumination. Wavelength
selected by interference filter, 40 nm bandwidth.
Monochromator optionally available |
| Polarisers |
Polaroid
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| Detector |
Digital
CCD camera. Resolution 12 bit per pixel,
area 256x256 pixel.
Dynamic
range > 70 dB (typical). Wavlength range
200 <  < 1200 nm.
A
larger CCD area (1024x1024 pixels) is available
upon request. Larger CCDs reduce the measurement
speed.
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| Spatial
Resolution |
3
µm at highest magnification |
| Table |
Ultra
high rigidity table with incident and reflection
arms in vertical plane. Arms separately driven
by stepping motors with angular resolution
of 1/100 degrees.Table allows rotation of arms
through 360°. Closest angle between arms
20°. 140 mm free diameter in center of
table. XYZ adjustable sample mount |
| Sensitivity |
Im(r),
Re(r) < 10-3
at 1 s response time (reflection
from glass) |
| Speed |
Ellipsometry
image: 65000 pixel in 1 s. Direct image (in
Brewster angle microscope mode): > 100
frames/s |
| Computer
Control |
Software
implemented as extension to the IgorPro data
analysis package by WaveMetrics (see additional
information sheet) running on Windows NT/2000. Hardware
interface through PCI bus with DMA transfer
of image data in real time. Contact us for
information on support of Macintosh PowerPC
systems |
| Data
Analysis |
Profile
traces, 3-dimensional surface plotting;
3-dimensional display of time resolved data;
QuickTime support. Image enhancement, FFT,
digital filters etc available (especially
useful in Brewster angle microscope mode).
Simulations
of ellipticity are provided for layers on
substrates, as a function of angle of incidence,
layer thickness, surface and film optical
anisotropy.
Data
import and export in standard image formats,
NanoScope AFM/STM images, and in formats
of many other programs such as Excel, MatLab,
and others.
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Special
Features
- Ellipsometry
image calculation can be turned off for use
as Brewster angle microscope
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In most cases, the modular design of the Imaging
Ellipsometer allows us to implement non-standard
setups without extra charge
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